Mr. Robert N. Kestner
Consultant at Akumen Engineering LLC
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | August 9, 2016
Proc. SPIE. 9908, Ground-based and Airborne Instrumentation for Astronomy VI
KEYWORDS: Antireflective coatings, Fabry–Perot interferometers, Polishing, Silica, Annealing, Optical coatings, Reflectivity, Thin film coatings, Ion beam finishing, Prototyping

SPIE Journal Paper | July 11, 2016
JATIS Vol. 2 Issue 03
KEYWORDS: Mirrors, Cameras, Monochromatic aberrations, Computer generated holography, Hubble Space Telescope, Space telescopes, Telescopes, Optical design, Interferometers, Astronomical imaging

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Mirrors, Optical design, Reticles, Optical lithography, Polarization, Process control, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | October 11, 2015
Proc. SPIE. 9633, Optifab 2015
KEYWORDS: Mirrors, Reticles, Metrology, Optical coatings, Wavefronts, Optical fabrication, Optical testing, Extreme ultraviolet, Extreme ultraviolet lithography, Optical alignment

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Mirrors, Metrology, Optical coatings, Wavefronts, Optical fabrication, Projection systems, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Reticles, Optical lithography, Cameras, Sensors, Wavefronts, Projection systems, Extreme ultraviolet, Artificial intelligence, Extreme ultraviolet lithography

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top