Robert N. Kestner
Consultant at Akumen Engineering LLC
SPIE Involvement:
Publications (9)

Proceedings Article | 9 August 2016 Paper
Proc. SPIE. 9908, Ground-based and Airborne Instrumentation for Astronomy VI
KEYWORDS: Antireflective coatings, Fabry–Perot interferometers, Polishing, Silica, Annealing, Optical coatings, Reflectivity, Thin film coatings, Ion beam finishing, Prototyping

SPIE Journal Paper | 11 July 2016
JATIS Vol. 2 Issue 03
KEYWORDS: Mirrors, Cameras, Monochromatic aberrations, Computer generated holography, Hubble Space Telescope, Space telescopes, Telescopes, Optical design, Interferometers, Astronomical imaging

Proceedings Article | 18 March 2016 Paper
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Mirrors, Optical design, Reticles, Optical lithography, Polarization, Process control, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 11 October 2015 Paper
Proc. SPIE. 9633, Optifab 2015
KEYWORDS: Mirrors, Reticles, Metrology, Optical coatings, Wavefronts, Optical fabrication, Optical testing, Extreme ultraviolet, Extreme ultraviolet lithography, Optical alignment

Proceedings Article | 17 April 2014 Paper
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Lithography, Mirrors, Metrology, Optical coatings, Wavefronts, Optical fabrication, Projection systems, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography

Showing 5 of 9 publications
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