Dr. Robert Kirchner
at TU Dresden
Area of Expertise:
Nanoimprint Lithography (UV-NIL) , Polymer Direct Patterning , Microsystems , Functional Polymers , Anti-Sticking Layer , Molecular Vapor Deposition
Publications (8)

SPIE Journal Paper | January 6, 2018
OE Vol. 57 Issue 04
KEYWORDS: Vacuum ultraviolet, Polymethylmethacrylate, Polymers, Surface roughness, Surface finishing, Micro optics, Lenses, Glasses, Two photon polymerization, Polymerization

PROCEEDINGS ARTICLE | January 2, 2018
Proc. SPIE. 10456, Nanophotonics Australasia 2017
KEYWORDS: Lithography, Electron beam lithography, Microlens array, Polymethylmethacrylate, Two photon polymerization, Lenses, Polymers, Surface roughness, Microlens, Surface finishing

PROCEEDINGS ARTICLE | September 28, 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Lithography, Polymethylmethacrylate, Polymers, Ultraviolet radiation, Micro optics, Microlens, Surface finishing, 3D microstructuring

PROCEEDINGS ARTICLE | March 21, 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Prisms, Polymethylmethacrylate, Lenses, Polymers, Glasses, Ultraviolet radiation, Surface roughness, Optical testing, Scanning electron microscopy, Microlens, Vacuum ultraviolet, Surface finishing, Absorption

PROCEEDINGS ARTICLE | February 24, 2017
Proc. SPIE. 10095, Laser 3D Manufacturing IV
KEYWORDS: Lithography, Electron beam lithography, Microlens array, Polymethylmethacrylate, Two photon polymerization, Lenses, Polymers, Glasses, Manufacturing, Surface roughness, Micro optics, Microlens, Nanoimprint lithography, Vacuum ultraviolet, Surface finishing

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Electron beams, Dry etching, Polymers, Scanning electron microscopy, Reactive ion etching, Plasma

Showing 5 of 8 publications
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