Dr. Robert Leitel
Junior Scientist at Fraunhofer IOF
SPIE Involvement:
Author
Area of Expertise:
interference coatings , plasma etching , microoptical systems
Websites:
Publications (15)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Optical components, Lithography, Light emitting diodes, Optical lithography, Calibration, Ultraviolet radiation, Ions, Photoresist materials, Liquid crystal on silicon, Spatial resolution, Freeform optics, Direct write lithography, New and emerging technologies, Grayscale lithography

PROCEEDINGS ARTICLE | March 16, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Diffraction, Optical filters, Mirrors, Multilayers, Reflectivity, Carbon dioxide lasers, Infrared radiation, Extreme ultraviolet, Spherical lenses, Binary data

PROCEEDINGS ARTICLE | September 25, 2014
Proc. SPIE. 9192, Current Developments in Lens Design and Optical Engineering XV
KEYWORDS: Optical design, Microlens array, Imaging systems, Manufacturing, Image sensors, Microlens, Modulation transfer functions, Spherical lenses, Semiconducting wafers, Prototyping

PROCEEDINGS ARTICLE | May 2, 2014
Proc. SPIE. 9130, Micro-Optics 2014
KEYWORDS: Photodetectors, Eye, Microlens array, Visualization, Sensors, Glasses, Navigation systems, Micro optics, Prototyping, Channel projecting optics

SPIE Journal Paper | October 1, 2011
JM3 Vol. 10 Issue 04
KEYWORDS: Wafer-level optics, Cameras, Modulation transfer functions, Channel projecting optics, Image sensors, Microlens array, Microlens, Semiconducting wafers, Image resolution, Prototyping

PROCEEDINGS ARTICLE | September 21, 2011
Proc. SPIE. 8167, Optical Design and Engineering IV
KEYWORDS: Eye, Microlens array, Imaging systems, Cameras, Polymers, Metals, Glasses, Chromium, Microlens, Reactive ion etching

Showing 5 of 15 publications
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