Dr. Robert Leitel
Senior Scientist, Group Manager at Fraunhofer IOF
SPIE Involvement:
Area of Expertise:
interference coatings , plasma etching , microoptical systems , grayscale lithography , molding , nano-imprint
Publications (16)

Proceedings Article | 15 June 2018
Proc. SPIE. 10692, Optical Fabrication, Testing, and Metrology VI
KEYWORDS: Microlens array, Stars, Lenses, Calibration, Photoresist materials, Collimation, Projection systems, Microlens, Photomasks, Grayscale lithography

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Optical components, Lithography, Light emitting diodes, Optical lithography, Calibration, Ultraviolet radiation, Ions, Photoresist materials, Liquid crystal on silicon, Spatial resolution, Freeform optics, Direct write lithography, New and emerging technologies, Grayscale lithography

Proceedings Article | 16 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Diffraction, Optical filters, Mirrors, Multilayers, Reflectivity, Carbon dioxide lasers, Infrared radiation, Extreme ultraviolet, Spherical lenses, Binary data

Proceedings Article | 25 September 2014
Proc. SPIE. 9192, Current Developments in Lens Design and Optical Engineering XV
KEYWORDS: Optical design, Microlens array, Imaging systems, Manufacturing, Image sensors, Microlens, Modulation transfer functions, Spherical lenses, Semiconducting wafers, Prototyping

Proceedings Article | 2 May 2014
Proc. SPIE. 9130, Micro-Optics 2014
KEYWORDS: Photodetectors, Eye, Microlens array, Visualization, Sensors, Glasses, Navigation systems, Micro optics, Prototyping, Channel projecting optics

Showing 5 of 16 publications
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