Dr. Robert Leitel
Senior Scientist, Group Manager at Fraunhofer IOF
SPIE Involvement:
Area of Expertise:
interference coatings , plasma etching , microoptical systems , grayscale lithography , molding , nano-imprint
Publications (17)

Proceedings Article | 6 April 2020 Presentation
Proc. SPIE. 11351, Unconventional Optical Imaging II

Proceedings Article | 15 June 2018 Paper
Proc. SPIE. 10692, Optical Fabrication, Testing, and Metrology VI
KEYWORDS: Microlens array, Stars, Lenses, Calibration, Photoresist materials, Collimation, Projection systems, Microlens, Photomasks, Grayscale lithography

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Optical components, Lithography, Light emitting diodes, Optical lithography, Calibration, Ultraviolet radiation, Ions, Photoresist materials, Liquid crystal on silicon, Spatial resolution, Freeform optics, Direct write lithography, New and emerging technologies, Grayscale lithography

Proceedings Article | 16 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Diffraction, Optical filters, Mirrors, Multilayers, Reflectivity, Carbon dioxide lasers, Infrared radiation, Extreme ultraviolet, Spherical lenses, Binary data

Proceedings Article | 25 September 2014 Paper
Proc. SPIE. 9192, Current Developments in Lens Design and Optical Engineering XV
KEYWORDS: Optical design, Microlens array, Imaging systems, Manufacturing, Image sensors, Microlens, Modulation transfer functions, Spherical lenses, Semiconducting wafers, Prototyping

Showing 5 of 17 publications
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