Robert Michels
at Fraunhofer-ILT
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Reflectivity, Extreme ultraviolet, Reflectance spectroscopy, Metrology, Critical dimension metrology, Spectroscopy, Reflectometry, Grazing incidence, Scanning electron microscopy, Scatterometry

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