Robert M. Olivier
at Groupe ESIEE
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 November 2002
Proc. SPIE. 4935, Smart Structures, Devices, and Systems
KEYWORDS: Microelectromechanical systems, Microresonators, Resonators, Sensors, Electrodes, Signal processing, Simulink, Beam shaping, Semiconducting wafers, Prototyping

Proceedings Article | 14 November 2002
Proc. SPIE. 4935, Smart Structures, Devices, and Systems
KEYWORDS: Microelectromechanical systems, Oscillators, Resonators, Sensors, Control systems, Transistors, CMOS technology, Chemical elements, Molybdenum, Environmental sensing

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Resonators, Sensors, Etching, Silicon, Deep reactive ion etching, Micromachining, Photoresist processing, Semiconducting wafers, Prototyping, Wafer bonding

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