Robert M. Olivier
at Groupe ESIEE
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 November 2002 Paper
Proc. SPIE. 4935, Smart Structures, Devices, and Systems
KEYWORDS: Resonators, Microresonators, Beam shaping, Prototyping, Simulink, Signal processing, Semiconducting wafers, Sensors, Microelectromechanical systems, Electrodes

Proceedings Article | 14 November 2002 Paper
Proc. SPIE. 4935, Smart Structures, Devices, and Systems
KEYWORDS: Microelectromechanical systems, Oscillators, Resonators, Sensors, Control systems, Transistors, Molybdenum, Environmental sensing, CMOS technology, Chemical elements

Proceedings Article | 13 November 2002 Paper
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Sensors, Resonators, Semiconducting wafers, Silicon, Etching, Deep reactive ion etching, Micromachining, Wafer bonding, Photoresist processing, Prototyping

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