Robert C. Pack
SPIE Involvement:
Publications (11)

Proceedings Article | 20 March 2019 Paper
Proceedings Volume 10962, 109620U (2019)
KEYWORDS: Data modeling, Chemical mechanical planarization, Statistical modeling, Performance modeling, Feature extraction, Lithography, Metals, Machine learning, Calibration, Design for manufacturing

Proceedings Article | 16 March 2016 Paper
Proceedings Volume 9781, 978109 (2016)
KEYWORDS: Design for manufacturing, Mining, Design for manufacturability, Manufacturing, Semiconductor manufacturing, Image classification, Machine learning, Optical proximity correction, Lithography, Semiconductors, Metals, Databases, Charge-coupled devices, Silicon, Data mining, Computer simulations

Proceedings Article | 18 March 2015 Paper
Proceedings Volume 9427, 942712 (2015)
KEYWORDS: Statistical analysis, Very large scale integration, Profiling, Data modeling, Databases, Metals, Data mining, Data processing, Data storage, Visualization

Proceedings Article | 8 October 2014 Paper
Proceedings Volume 9235, 92351Y (2014)
KEYWORDS: Profiling, Photomasks, Optical proximity correction, Image classification, Critical dimension metrology, Product engineering, Neodymium, Structural design, Ions, Library classification systems

Proceedings Article | 8 October 2014 Paper
Proceedings Volume 9235, 923509 (2014)
KEYWORDS: Photomasks, Optical proximity correction, Lithography, Vestigial sideband modulation, Semiconducting wafers, Data modeling, Model-based design, Error analysis, Manufacturing, Critical dimension metrology

Showing 5 of 11 publications
Proceedings Volume Editor (2)

Conference Committee Involvement (2)
Design and Process Integration for Microelectronic Manufacturing II
27 February 2003 | Santa Clara, CA, United States
Design and Process Integration for Microelectronics Manufacturing
6 March 2002 | Santa Clara, CA, United States
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top