Robert C. Pack
IC Technology at
SPIE Involvement:
Conference Co-Chair | Author
Publications (13)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Data modeling, Calibration, Metals, Feature extraction, Design for manufacturing, Machine learning, Statistical modeling, Performance modeling, Chemical mechanical planarization

Proceedings Article | 16 March 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Semiconductors, Data mining, Lithography, Databases, Metals, Silicon, Manufacturing, Computer simulations, Mining, Design for manufacturing, Machine learning, Semiconductor manufacturing, Image classification, Charge-coupled devices, Optical proximity correction, Design for manufacturability

Proceedings Article | 18 March 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Data mining, Statistical analysis, Data modeling, Visualization, Data storage, Databases, Metals, Data processing, Profiling, Very large scale integration

Proceedings Article | 8 October 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Ions, Profiling, Photomasks, Image classification, Optical proximity correction, Critical dimension metrology, Structural design, Neodymium, Product engineering, Library classification systems

Proceedings Article | 8 October 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Lithography, Data modeling, Error analysis, Manufacturing, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Model-based design, Vestigial sideband modulation

Proceedings Article | 9 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Data modeling, Databases, Manufacturing, Inspection, Design for manufacturing, Photomasks, Optical proximity correction, Semiconducting wafers, Model-based design, Resolution enhancement technologies

Showing 5 of 13 publications
Conference Committee Involvement (2)
Design and Process Integration for Microelectronic Manufacturing II
27 February 2003 | Santa Clara, CA, United States
Design and Process Integration for Microelectronics Manufacturing
6 March 2002 | Santa Clara, CA, United States
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