Dr. Robert B. Reichenbach
at Intel Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 24 January 2004
Proc. SPIE. 5344, MEMS/MOEMS Components and Their Applications
KEYWORDS: Microelectromechanical systems, Actuators, Transceivers, Oscillators, Resonators, Domes, Frequency modulation, Fermium, Resistors, Signal detection

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Oxides, Electronics, Oscillators, Resonators, Etching, Annealing, Silicon, Laser resonators, Helium neon lasers

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Microresonators, Oscillators, Modulation, Resonators, Interferometry, Domes, Positive feedback, Signal detection, Phase shifts

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top