Robert Seidel
at Univ of Chicago
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 6, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Nanostructures, Optical lithography, Polymers, Chemistry, Computer simulations, Scanning electron microscopy, Monte Carlo methods, Directed self assembly, Thermodynamics, Molecular self-assembly

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Etching, Chemistry, Directed self assembly, Plasma etching, Line edge roughness, Semiconducting wafers, Tolerancing

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Polymethylmethacrylate, Etching, Ions, Chemistry, Scanning electron microscopy, Photoresist materials, Directed self assembly, Picosecond phenomena, Neodymium

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