Robert D. White
Graduate Student at Univ of Michigan
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 January 2005
Proc. SPIE. 5718, Microfluidics, BioMEMS, and Medical Microsystems III
KEYWORDS: Microfluidics, Sensors, Etching, Electrodes, Silicon, Deep reactive ion etching, Motion models, Acoustics, Motion measurement, Semiconducting wafers

Proceedings Article | 11 July 2002
Proc. SPIE. 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology
KEYWORDS: Oxides, Microfluidics, Etching, Silicon, Transducers, Epoxies, Acoustics, Semiconducting wafers, Adhesives, Wafer bonding

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