Dr. Roelof W. Wijnaendts van Resandt Profile

Dr. Roelof W. Wijnaendts van Resandt

President & Chief Executive Officer

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Publications (3)

Proceedings Article | 23 January 2006 Paper

SU-8 multiple layer structuring by means of maskless photolithography (DWL66)

Amir Saghiri, Matthias Kaden, Konrad Rössler, Roel Wijnaendts, Sven Preuss, Alexander Forozan

Proceedings Volume 6110, 611003 (2006) https://doi.org/10.1117/12.643777

KEYWORDS: Stereolithography, Bragg cells, Lenses, Photoresist materials, Coating, Optical lithography, Absorption, Quartz, Computer aided design, Multilayers

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Proceedings Article | 28 July 1994 Paper

Super resolution lithography using a direct-write laser pattern generator

Roelof Wijnaendts van Resandt, Christian Buchner

Proceedings Volume 2213, (1994) https://doi.org/10.1117/12.180969

KEYWORDS: Photomasks, Imaging systems, Photoresist materials, Semiconducting wafers, Modulation transfer functions, Lithography, Spatial frequencies, Super resolution, Coherence imaging, Coherence (optics)

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Proceedings Article | 1 June 1990 Paper

Comparison of metrology methods for measurement of micron and submicron resist and polysilicon features

Susan Jones, Robert Van Asselt, John Russ, Bruce Dudley, Gloria Johnson, Roelof Wijnaendts van Resandt, Peter Herman

Proceedings Volume 1261, (1990) https://doi.org/10.1117/12.20032

KEYWORDS: Scanning electron microscopy, Resistance, Metrology, Inspection, Photoresist materials, Integrated circuits, Process control, Deep ultraviolet, Semiconducting wafers, Confocal microscopy

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