Prof. Roger T. Bonnecaze
Professor at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 20 March 2019
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Data modeling, Calibration, Etching, Neural networks, Cadmium sulfide, Plasma etching, Critical dimension metrology, Semiconducting wafers, Process modeling, Plasma

Proceedings Article | 20 March 2019
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Amorphous silicon, Analytics, Data modeling, Calibration, Etching, Manufacturing, Plasma etching, Reactive ion etching, Plasma

Proceedings Article | 20 March 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Argon, Chemical species, Ions, Silicon, Surface roughness, Chlorine, Focus stacking software, Plasma

Proceedings Article | 20 March 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Data modeling, Databases, Etching, Argon, Particles, Plasma etching, Autoregressive models, Plasma systems, Temperature metrology, Plasma

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Data modeling, Calibration, Etching, Argon, Ions, Chemistry, Autoregressive models, Systems modeling, Model-based design, Plasma

Showing 5 of 14 publications
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