Roger Shile
Senior MEMS Engineer at NanoInk Inc
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 9 March 2013
Proc. SPIE. 8615, Microfluidics, BioMEMS, and Medical Microsystems XI
KEYWORDS: Oxides, Microfluidics, Proteins, Capillaries, Silicon, Scanning probe lithography, Throat, Printing, Microfabrication, Liquids

Proceedings Article | 9 March 2013
Proc. SPIE. 8615, Microfluidics, BioMEMS, and Medical Microsystems XI
KEYWORDS: Oxides, Sensors, Etching, Silicon, Scanning probe lithography, Boron, Microfabrication, Resistors, Semiconducting wafers, Wafer bonding

Proceedings Article | 19 February 2009
Proc. SPIE. 7207, Microfluidics, BioMEMS, and Medical Microsystems VII
KEYWORDS: Microelectromechanical systems, Lithography, Nanostructures, Optical lithography, Molecules, Silicon, Multiplexing, Scanning probe lithography, Nanofabrication, Nanolithography

Proceedings Article | 30 April 2008
Proc. SPIE. 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II
KEYWORDS: Lithography, Nanostructures, Optical lithography, Metals, Scanners, Molecules, Silicon, Multiplexing, Scanning probe lithography, Nanolithography

Proceedings Article | 3 May 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Gold, Nanotechnology, Nanostructures, Optical lithography, Etching, Metals, Molecules, Silicon, Scanning probe lithography, Nanolithography

Showing 5 of 6 publications
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