Rokhaya Gueye
at Ecole Polytechnique Fédérale de Lausanne
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 9, 2013
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Microelectromechanical systems, Gold, Electronics, Resonators, Glasses, Silicon, Aluminum, Semiconducting wafers, Nanoelectromechanical systems, Wafer bonding

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