Dr. Roland Fuessl
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Electron beam lithography, Etching, Silicon, Scanning probe lithography, Optical alignment, Reactive ion etching, Nanoelectronics, Cryogenics, Nanolithography

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Optical lithography, Scanners, Silicon, Inspection, Scanning probe lithography, Atomic force microscopy, Photomasks, Optical alignment, Nanoelectronics

PROCEEDINGS ARTICLE | May 22, 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Mirrors, Beam splitters, Metrology, Interferometers, Calibration, Monte Carlo methods, Distance measurement, Scanning probe microscopy, Thermal modeling, Scanning probe microscopes

PROCEEDINGS ARTICLE | August 11, 2008
Proc. SPIE. 7064, Interferometry XIV: Applications
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, 3D modeling, Time metrology, Analytical research, Mirror pointing, Lead, Protactinium

PROCEEDINGS ARTICLE | August 14, 2006
Proc. SPIE. 6292, Interferometry XIII: Techniques and Analysis
KEYWORDS: Mirrors, Interferometers, Sensors, Calibration, Control systems, Demodulation, Time metrology, Laser stabilization, Motion measurement, Motion analysis

PROCEEDINGS ARTICLE | February 14, 2005
Proc. SPIE. 5776, Eighth International Symposium on Laser Metrology
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Calibration, Wafer inspection, Photomasks, Scanning probe microscopy, System integration, Sensor technology

Showing 5 of 7 publications
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