Dr. Rolf Krueger-Sehm
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 14, 2010
Proc. SPIE. 7718, Optical Micro- and Nanometrology III
KEYWORDS: Chromatic aberrations, Microscopes, Mirrors, Light sources, Interferometers, Cameras, Calibration, Interferometry, Linear filtering, Objectives

PROCEEDINGS ARTICLE | August 27, 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Microscopes, Diffraction, Beam splitters, Light sources, Eye, Calibration, Platinum, Precision measurement, Objectives, Eye models

PROCEEDINGS ARTICLE | September 10, 2004
Proc. SPIE. 5457, Optical Metrology in Production Engineering
KEYWORDS: Ellipsometry, Microscopes, Interferometers, Sensors, Calibration, Silicon, Head, Objectives, Scanning probe microscopy, Phase shifts

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