Dr. Rolf Krueger-Sehm
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 May 2010
Proc. SPIE. 7718, Optical Micro- and Nanometrology III
KEYWORDS: Interferometers, Calibration, Objectives, Microscopes, Cameras, Linear filtering, Mirrors, Interferometry, Chromatic aberrations, Light sources

Proceedings Article | 27 August 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Microscopes, Diffraction, Calibration, Objectives, Light sources, Eye, Platinum, Beam splitters, Precision measurement, Eye models

Proceedings Article | 10 September 2004
Proc. SPIE. 5457, Optical Metrology in Production Engineering
KEYWORDS: Scanning probe microscopy, Microscopes, Sensors, Head, Calibration, Ellipsometry, Objectives, Phase shifts, Silicon, Interferometers

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