A relatively simple technique of high-energy ion implantation of the pulsed laser plasma under the influence of an
external pulsed electric field is suggested. The developed mathematical model allows forecasting depth distribution of
implanted atoms on the basis of experimental measurements of fundamental physical characteristics of the pulsed laser
plasma and the technical parameters of high-voltage system. The possibility of implantation of platinum ions from laser
plasma to create on-chip <i>n</i>-SiC hydrogen sensor for use in complicated conditions is demonstrated.
Peculiarities of WO<sub>x</sub> films fabrication by reactive pulsed laser deposition for high temperature Pt-oxide-SiC devices
formation were investigated. Deposition of the oxide film was also carried out in such a way as to prevent deposition of
droplet fraction (deposition with anti-droplet screen). Direct Simulation Monte Carlo and Kinetic Monte Carlo methods
were performed for the deposition processes modeling. The response of the SiC-based devices to hydrogen-containing
gases depends on the conditions of deposition of the oxide layer. The best properties were found in the sensor obtained
by depositing the scattered flux of W atoms in a shady area on SiC substrate at an oxygen pressure of 10 Pa.
MoSe<sub>x</sub> coatings were obtained by pulsed laser deposition in vacuum and inert Ar gas atmosphere at the pressure from 1 to 10 Pa. The deposition temperature was 200°C. The films were studied by means of X-ray diffraction, scanning and transmission electron spectroscopy, X-ray photoelectron spectroscopy, Rutherford backscattering spectroscopy of helium ions. The tribological properties of thin film coatings were investigated by pin-on-disk testing in air with 50% relative humidity. Chemical composition, structure, and tribological properties of the coatings were found to be sensitive to the presence of the inert gas. Thus, increasing the gas pressure from 1 to 10 Pa changes the chemical composition, so that the value of <i>x</i> increases from 1.5 to 2.4 in the principal deposition zone. At the optimal gas pressure (~ 2 Pa), the composition of the coating was close to the stoichiometric one, and the layer adjacent to the substrate consisted of MoSe<sub>x</sub> nano-crystals with the basal planes parallel to the substrate surface or oriented at small angles to the surface. The tribological properties of MoSex coatings deposited on steel substrates depend on the gas pressure. The friction coefficient in air decreases from 0.08 for deposition in vacuum to 0.04 for deposition at the optimal pressure.