Roman V. Zakharchenko
at National Research Nuclear Univ MEPhI
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Semiconductors, Titanium, Annealing, Nickel, Silicon, Resistance, Aluminum, Transistors, Field effect transistors, Heterojunctions

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Silica, Graphene, Dielectrics, Silicon, Chemical vapor deposition, Silicon films, Transistors, Field effect transistors, Plasma etching, Plasma

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