Ron Hanestad
at TEL FSI Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 September 2001 Paper
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Microelectromechanical systems, Gold, Oxides, Etching, Silicon, Photoresist materials, Silicon films, Aluminum, Semiconducting wafers, Liquids

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