Mr. Ron Taylor
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Carbon, Reticles, Optical lithography, Contamination, Air contamination, Ions, Reflectivity, Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Atmospheric particles, Ruthenium

PROCEEDINGS ARTICLE | October 25, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Reticles, Roads, Image processing, Manufacturing, Inspection, Control systems, Inspection equipment, Factory automation, High volume manufacturing, Semiconducting wafers

PROCEEDINGS ARTICLE | October 8, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Reticles, Contamination, Defect detection, Air contamination, Particles, Inspection, Image analysis, Photomasks, Optical proximity correction, SRAF

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