Dr. Ronald J. Pandolfi
at Lawrence Berkeley National Lab.
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 3 May 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Scattering, X-rays, 3D image reconstruction, Extreme ultraviolet, X-ray imaging, Extreme ultraviolet lithography, 3D image processing, Modulation, Carbon, Image enhancement

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Nanostructures, Data modeling, Scattering, X-rays, Manufacturing, Electron microscopes, Scanning electron microscopy, Data acquisition, Line width roughness, Line edge roughness

Proceedings Article | 9 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Carbon, 3D image reconstruction, Modulation, Scattering, X-rays, Laser scattering, Extreme ultraviolet, Extreme ultraviolet lithography, X-ray imaging, Absorption

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Nanostructures, Metrology, Genetic algorithms, Scattering, X-rays, Grazing incidence

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