Ronan Barry
at Analog Devices
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 5044, Advanced Process Control and Automation
KEYWORDS: Manufacturing, Control systems, Computer simulations, Process control, Neural networks, Critical dimension metrology, Algorithm development, Feedback control, Device simulation, Evolutionary algorithms

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Oxides, Diffraction, Sensors, Metals, CCD cameras, Photomasks, Critical dimension metrology, Analog electronics, Semiconducting wafers, Wafer testing

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