To be competitive in laser micro machining, high throughput is an important aspect. One possibility to increase
productivity is scaling up the ablation process i.e. linearly increasing the laser repetition rate together with the average
power and the scan speed. In the MHz-regime high scan speeds are required which cannot be provided by commercially
available galvo scanners. In this work we will report on the results by using a polygon line scanner having a maximum
scan speed of 100 m/s and a 50 W ps-laser system, synchronized via the SuperSync™ technology. We will show the
results concerning the removal rate and the surface quality for working at the optimum point i.e. most efficient point at
repetition rates up to 8.2 MHz.