Dr. Rossana Cambie
at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | September 28, 2011
Proc. SPIE. 8139, Advances in X-Ray/EUV Optics and Components VI
KEYWORDS: Multilayers, X-rays, X-ray diffraction, Silicon, Diffusion, Coating, Atomic force microscopy, Solids, Semiconducting wafers, Diffraction gratings

SPIE Journal Paper | September 1, 2011
OE Vol. 50 Issue 09
KEYWORDS: Modulation transfer functions, Calibration, Transmission electron microscopy, Scanning electron microscopy, Electron microscopes, Binary data, Interferometers, Profilometers, Spatial frequencies, Microscopes

PROCEEDINGS ARTICLE | September 2, 2010
Proc. SPIE. 7801, Advances in Metrology for X-Ray and EUV Optics III
KEYWORDS: Spatial frequencies, Interferometers, Calibration, Silicon, Interferometry, Electron microscopes, Scanning electron microscopy, Transmission electron microscopy, Modulation transfer functions, Binary data

PROCEEDINGS ARTICLE | August 27, 2010
Proc. SPIE. 7802, Advances in X-Ray/EUV Optics and Components V
KEYWORDS: Diffraction, Multilayers, Etching, Chemical species, X-rays, Silicon, Diffusion, Transmission electron microscopy, Extreme ultraviolet, Diffraction gratings

SPIE Journal Paper | May 1, 2010
OE Vol. 49 Issue 05
KEYWORDS: Modulation transfer functions, Calibration, Spatial frequencies, Binary data, Profilometers, Etching, Microscopes, Scanning probe microscopy, Interferometry, Silicon

PROCEEDINGS ARTICLE | September 9, 2009
Proc. SPIE. 7448, Advances in X-Ray/EUV Optics and Components IV
KEYWORDS: Diffraction, Multilayers, Etching, X-rays, Silicon, Extreme ultraviolet, Scanning probe microscopy, Semiconducting wafers, Anisotropic etching, Diffraction gratings

Showing 5 of 9 publications
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