Dr. Rostyslav Mastylo
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | June 26, 2017
Proc. SPIE. 10329, Optical Measurement Systems for Industrial Inspection X
KEYWORDS: Confocal microscopy, Diffraction, Edge detection, 3D surface sensing, Calibration, Optical coherence tomography, Interferometry, 3D metrology, Signal analyzers

PROCEEDINGS ARTICLE | June 26, 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Semiconductors, Diffraction, Sensors, Scatterometry, Near field, Optical simulations, Geometrical optics, Semiconducting wafers, Laser optics, Near field optics

PROCEEDINGS ARTICLE | June 18, 2007
Proc. SPIE. 6616, Optical Measurement Systems for Industrial Inspection V
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Atomic force microscopy, Nanoprobes, Optical testing, Spatial resolution, Helium neon lasers, Mechatronics

PROCEEDINGS ARTICLE | October 25, 2006
Proc. SPIE. 6280, Third International Symposium on Precision Mechanical Measurements
KEYWORDS: Microscopes, Mirrors, Metrology, Interferometers, Sensors, Atomic force microscopy, Nanoprobes, Optical testing, Spatial resolution, Sensor technology

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Nanotechnology, Microscopes, Mirrors, Metrology, Interferometers, Sensors, Atomic force microscopy, Optical testing, Spatial resolution, Sensor technology

PROCEEDINGS ARTICLE | October 20, 2005
Proc. SPIE. 5965, Optical Fabrication, Testing, and Metrology II
KEYWORDS: Microscopes, Diffraction, Mirrors, Holograms, Metrology, Interferometers, Sensors, Calibration, Integrated optics, Sensor technology

Showing 5 of 8 publications
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