Dr. Rostyslav Mastylo
at Technische Univ Ilmenau
SPIE Involvement:
Publications (14)

Proceedings Article | 1 April 2020 Presentation + Paper
Proc. SPIE. 11352, Optics and Photonics for Advanced Dimensional Metrology
KEYWORDS: Fourier spectroscopy, Diffraction, Metrology, Sensors, Video, Wavefront sensors, Wavefronts, Scatterometry, Binary data, Inverse optics

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Actuators, Nanotechnology, Mirrors, Interferometers, Manufacturing, Physics, Control systems, Atomic force microscopy, Nanofabrication, Near field optics

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Frequency combs, Precision measurement, Helium neon lasers, Laser metrology, Sensor technology, Optics manufacturing

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Diffraction, Metrology, Polarization, Sensors, 3D modeling, Instrument modeling

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Fabrication, Lithography, Nanostructures, Optical sensors, Sensors, Ultraviolet radiation, Silicon, Scanning electron microscopy, Nanoimprint lithography, Photoresist processing

Showing 5 of 14 publications
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