Dr. Rostyslav Mastylo
at Technische Univ Ilmenau
SPIE Involvement:
Publications (12)

Proceedings Article | 21 June 2019
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Frequency combs, Precision measurement, Helium neon lasers, Laser metrology, Sensor technology, Optics manufacturing

Proceedings Article | 21 June 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Diffraction, Metrology, Polarization, Sensors, 3D modeling, Instrument modeling

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Fabrication, Lithography, Nanostructures, Optical sensors, Sensors, Ultraviolet radiation, Silicon, Scanning electron microscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 4 March 2019
Proc. SPIE. 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
KEYWORDS: Confocal microscopy, Sensors, Laser processing, Laser scanners, Fiber coupled lasers

Proceedings Article | 26 June 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Semiconductors, Diffraction, Sensors, Scatterometry, Near field, Optical simulations, Geometrical optics, Semiconducting wafers, Laser optics, Near field optics

Showing 5 of 12 publications
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