Mr. Rudra Kumar Profile

Rudra Kumar

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Publications (1)

Proceedings Article | 26 March 2020 Presentation + Paper

Satinder Sharma, Rudra Kumar, Manvendra Chauhan, Mohamad Moinuddin, Jerome Peter, Subrata Ghosh, Chullikkattil Pradeep, Kenneth Gonsalves

Proceedings Volume 11326, 1132604 (2020) https://doi.org/10.1117/12.2552189

KEYWORDS: Electron beam lithography, Nickel, Metals, Etching, Line edge roughness, Line width roughness, Silicon, Helium, Resistance, Thin films

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