Dr. Rudy Schlaf
Assistant Professor at Univ of South Florida
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 24 May 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Code division multiplexing, Electron beam lithography, Silicon, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Ion beams, Plasma enhanced chemical vapor deposition, Semiconducting wafers, Carbon nanotubes

Proceedings Article | 2 June 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Code division multiplexing, Metals, Silicon, Manufacturing, Chromium, Ion beams, Plasma enhanced chemical vapor deposition, Critical dimension metrology, Carbon nanotubes, Scanning probe metrology

Proceedings Article | 16 July 2002
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Code division multiplexing, Nickel, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Ion beams, Plasma enhanced chemical vapor deposition, Critical dimension metrology, Carbon nanotubes, Scanning probe metrology

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