Dr. Rudy J. Wojtecki
Director Process Engineering at Applied Materials Inc.
SPIE Involvement:
Publications (7)

SPIE Journal Paper | 21 July 2021
Giuseppina Conti, Henrique Martins, Isvar Cordova, Jonathan Ma, Rudy Wojtecki, Patrick Naulleau, Slavomír Nemšák
JM3, Vol. 20, Issue 03, 034603, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.034603
KEYWORDS: Extreme ultraviolet lithography, Interfaces, X-rays, Photoresist materials, Mirrors, Aluminum, Multilayers, Self-assembled monolayers, Photoemission spectroscopy, X-ray characterization

Proceedings Article | 10 November 2020 Presentation + Paper
G. Conti, H. Perin Martins, I. Cordova, J. Ma, R. Wojtecki, P. Naulleau, S. Nemsak
Proceedings Volume 11517, 115170I (2020) https://doi.org/10.1117/12.2575463
KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Nondestructive evaluation, Photoemission spectroscopy, Interfaces, Nanolithography, Photoresist developing, Transistors, Extreme ultraviolet, Optical properties

Proceedings Article | 20 September 2020 Presentation
Jonathan Ma, Isvar Cordova, Rudy Wojtecki, Andrew Neureuther, Patrick Naulleau
Proceedings Volume 11517, 115170H (2020) https://doi.org/10.1117/12.2574879
KEYWORDS: Self-assembled monolayers, Chemistry, Interfaces, Extreme ultraviolet, Electrons, Chemical reactions, Extreme ultraviolet lithography, Deep ultraviolet, New and emerging technologies, Lithography

Proceedings Article | 24 March 2020 Presentation
Proceedings Volume 11326, 113260R (2020) https://doi.org/10.1117/12.2551982

Proceedings Article | 25 March 2019 Presentation
Proceedings Volume 10960, 109600P (2019) https://doi.org/10.1117/12.2515465
KEYWORDS: Atomic layer deposition, Etching, Lithography, Self-assembled monolayers, Photomasks, Overlay metrology, Semiconductors, Hydrogen, Polymer thin films, Polymers

Showing 5 of 7 publications
Conference Committee Involvement (2)
Advances in Patterning Materials and Processes XXXIX
25 April 2022 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVIII
22 February 2021 | Online Only, California, United States
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