Dr. Rudy J. Wojtecki
at IBM Research - Almaden
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Semiconductors, Oxides, Electron beam lithography, Optical lithography, Etching, Polymers, Interfaces, Semiconductor materials, Silicon, Head-mounted displays

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Polymers, Spectroscopy, Diffusion, Magnetism, Carbonates, Adsorption, Polymerization, Picosecond phenomena, Chromatography, Rhodium, Molecular self-assembly, Liquids

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