Prof. Rui Chen
at Institute of Microelectronics CAS
SPIE Involvement:
Author
Publications (19)

SPIE Journal Paper | 23 March 2021
JM3 Vol. 20 Issue 01

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV
KEYWORDS: Lithography, Convolutional neural networks, Data modeling, Sensors, Neural networks, Machine learning, Optics manufacturing, Yield improvement, Statistical modeling, Performance modeling

Proceedings Article | 22 February 2021 Poster + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Lithography, Imaging systems, Signal processing, Photomasks, Machine learning, Integrated circuits, Optical proximity correction, Convolution, Optimization (mathematics), Systems modeling

Proceedings Article | 22 February 2021 Poster + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Diffraction, Visible radiation, Metrology, Finite-difference time-domain method, Reliability, Signal processing, Semiconductor manufacturing, Tolerancing, Overlay metrology, Chemical mechanical planarization

Proceedings Article | 22 February 2021 Poster + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Lithography, Fourier transforms, Transform theory, Signal processing, Machine learning, Integrated circuits, Image classification, Source mask optimization, Convolution, Network architectures

Showing 5 of 19 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top