Micro-worktable is an important part of a micro-assembly system, and it implements the translation along X- and Y- axes and the rotation along X-, Y- and Z-axes of the assembly system. In order to amplify the micro-worktable displacement output and improve the micro-positioning accuracy, a novel 3-DOF organ-drive-inspecting micro-positioning worktable was designed and analyzed using modified double-parallelogram symmetrical structure flexure hinge and piezoelectric-actuators. For the symmetric mechanism effectively eliminated the coupling deflection angle and limited the vertical direction motion, the modified double-parallelogram flexure hinge increased the output displacement of X, Y and Z axes. Finite element model of the micro-worktable was established in ANSYS to make its static performances simulation by finite elements method (FEM). Simulation results showed that stiffness and accuracy of the modified double-parallelogram flexure hinge mechanism are higher than general double-parallelogram flexure hinge mechanism, and output displacement linearity is better than single-parallelogram flexure hinge mechanism. Flexure hinge mechanism and piezoelectric-actuator self-features reduce the system complexity, coupling displacement error, and also assure the stable accuracy, high resolution, and high frequent-response of the micro-positioning worktable. Finally, static performance was tested and analyzed through experiments. In experiments, the piezoelectric-power provided voltage to drive the micro-positioning worktable along X, Y and Z axes, and an electric inductance micrometer dial was used to measure the output displacement. Experimental results show that the resolution is 0.04μm for displacement in X, Y, and Z axes, and the maximum stroke length reaches 6μm. The design meets with the requirement of the micro-assembly system.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.