Ruiling Duan
at Tsinghua Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2006
Proc. SPIE. 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials
KEYWORDS: Microelectromechanical systems, Actuators, Microsystems, Photography, Reliability, Pollution control, Finite element methods, Analytical research, Inductance, Device simulation

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