Rumi Ito
at NuFlare Technology Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 September 2020 Poster + Presentation + Paper
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Electron beams, Diffusion, Photomasks, Statistical modeling, Vestigial sideband modulation

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Optical lithography, Spatial frequencies, Etching, Image processing, Chromium, Photomasks, Picosecond phenomena, Line edge roughness, Photoresist processing, Edge roughness

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