Ms. Rumi Ito Profile

Rumi Ito

at NuFlare Technology Inc

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Publications (2)

Proceedings Article | 20 September 2020 Poster + Presentation + Paper

Study on physical model of resist surface charge in electron beam mask writer EBM-9500PLUS

Haruyuki Nomura, Noriaki Nakayamada, Takehiko Katsumata, Rumi Ito, Yoshinori Kojima

Proc. SPIE. 11518, Photomask Technology 2020

KEYWORDS: Electron beams, Diffusion, Photomasks, Statistical modeling, Vestigial sideband modulation

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Proceedings Article | 23 March 2020 Paper

Contribution ratio of process fidelity and beam accuracy in multi-beam mask writing

Rumi Ito, Yoshinori Kojima, Hiroshi Matsumoto

Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020

KEYWORDS: Optical lithography, Spatial frequencies, Etching, Image processing, Chromium, Photomasks, Picosecond phenomena, Line edge roughness, Photoresist processing, Edge roughness

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