Rupal K. Patel
Sr Member of Technical Staff at Sandia National Labs
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 September 2006
Proc. SPIE. 6287, Optical Technologies for Arming, Safing, Fuzing, and Firing II
KEYWORDS: Oxides, Photovoltaics, Sun, Metals, Solar cells, Dielectrics, Silicon, Scanning electron microscopy, Semiconducting wafers, Dielectric breakdown

Proceedings Article | 23 August 2005
Proc. SPIE. 5871, Optical Technologies for Arming, Safing, Fuzing, and Firing
KEYWORDS: Semiconductors, Oxides, Etching, Solar cells, Dielectrics, Silicon, Plasma etching, Semiconducting wafers, Chemical mechanical planarization, Absorption

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