Dr. Ryan Callahan
Business and Technology Manager at FUJIFILM Electronic Materials USA Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (3)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Lithium, Optical lithography, Molecules, Photoresist materials, Ionization, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, FT-IR spectroscopy, Transparency, Polymers, Ultraviolet radiation, Electrons, Gases, Pellicles, Fluorine, Polymer thin films

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Transparency, Optical lithography, Imaging systems, Polymers, Spectroscopy, Photoresist materials, Photomasks, Absorbance, Carbon monoxide, Binary data

Conference Committee Involvement (4)
Advances in Patterning Materials and Processes XXXVI
24 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIII
29 February 2016 | San Jose, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top