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Ryo Kizaki
at Osaka Univ
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Publications (1)
Proceedings Article | 21 June 2019 Paper
Absolute distance measurement of optical path length of non-contact three-dimensional nanoprofiler based on normal vector tracing method by tandem white-light interferometer
Jungmin Kang, Takao Kitayama, Ryo Kizaki, Yui Toyoshi, Kota Hashimoto, Agustinus Winarno, Kiyoshi Takamasu, Kazuya Yamamura, Katsuyoshi Endo
Proceedings Volume 11056, 110560D (2019) https://doi.org/10.1117/12.2525071
KEYWORDS: Interferometers, Error analysis, Distance measurement, Beam splitters, Mirrors, Spherical lenses, Computer programming, Refractive index
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