Dr. Ryo Shibata
at Nikon Corp
SPIE Involvement:
Author
Publications (29)

Proceedings Article | 23 March 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Carbon, Apodization, Mirrors, Multilayers, Contamination, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Oxidation

Proceedings Article | 3 October 2007
Proc. SPIE. 6688, Optics for EUV, X-Ray, and Gamma-Ray Astronomy III
KEYWORDS: Reflectors, Telescopes, Mirrors, Satellites, Error analysis, X-rays, Image quality, Space telescopes, X-ray telescopes, Hard x-rays

Proceedings Article | 15 June 2006
Proc. SPIE. 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
KEYWORDS: Reflectors, Telescopes, Reflection, X-rays, Reflectivity, Image quality, Space telescopes, Reflector telescopes, X-ray telescopes, Hard x-rays

Proceedings Article | 15 June 2006
Proc. SPIE. 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
KEYWORDS: Reflectors, Telescopes, Mirrors, X-rays, Reflectivity, Image quality, Space telescopes, Reflector telescopes, X-ray telescopes, Hard x-rays

Proceedings Article | 15 June 2006
Proc. SPIE. 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
KEYWORDS: Telescopes, Sensors, Photomultipliers, X-rays, Scintillators, Space telescopes, Scintillation, Synchrotron radiation, X-ray telescopes, Hard x-rays

Proceedings Article | 15 June 2006
Proc. SPIE. 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
KEYWORDS: Imaging systems, Calibration, X-rays, Space telescopes, Scintillation, Charge-coupled devices, Synchrotrons, Synchrotron radiation, X-ray telescopes, Hard x-rays

Showing 5 of 29 publications
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