Dr. Ryo Shinozaki
at
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | January 1, 2006
OE Vol. 45 Issue 01
KEYWORDS: Inspection, Optical proximity correction, Mirrors, Curium, Optical inspection, Sensors, Phase modulation, Optical engineering, Optical testing, Manufacturing

PROCEEDINGS ARTICLE | January 20, 2005
Proc. SPIE. 5633, Advanced Materials and Devices for Sensing and Imaging II
KEYWORDS: Mirrors, Curium, Phase modulation, Reflection, Sensors, Scanners, Error analysis, Inspection, Aluminum, Vibration isolation

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