Dr. Ryo Shinozaki Profile

Dr. Ryo Shinozaki

SPIE Involvement:

Author

Publications (2)

SPIE Journal Paper | 1 January 2006

In-process inspection of surface-profile properties by detecting laser beam deflection

Ryo Shinozaki, Osami Sasaki, Takamasa Suzuki

OE, Vol. 45, Issue 01, 013601, (January 2006) https://doi.org/10.1117/12.10.1117/1.2150821

KEYWORDS: Inspection, Optical proximity correction, Mirrors, Curium, Optical inspection, Sensors, Phase modulation, Optical engineering, Optical testing, Manufacturing

Read Abstract +

Proceedings Article | 20 January 2005 Paper

One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam

Ryo Shinozaki, Osami Sasaki, Takamasa Suzuki

Proceedings Volume 5633, (2005) https://doi.org/10.1117/12.577647

KEYWORDS: Mirrors, Reflection, Curium, Scanners, Sensors, Aluminum, Phase modulation, Error analysis, Inspection, Vibration isolation

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years