Ryo Takigawa
at Univ of Tokyo
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 October 2006
Proc. SPIE. 6376, Optomechatronic Micro/Nano Devices and Components II
KEYWORDS: Gold, Optical components, Thin films, Waveguides, Argon, Silicon, Scanning electron microscopy, Silicon films, Temperature metrology, Plasma

Proceedings Article | 6 December 2005
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Gold, Optical fibers, Titanium, Waveguides, Argon, Interfaces, Silicon, Integrated optics, Semiconducting wafers, Plasma

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