Ryohei Sakamoto
Graduate Student at Ritsumeikan Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Actuators, Gold, Ferroelectric materials, Microfluidics, Etching, Silicon, Photomasks, Aluminum, Semiconducting wafers, Device simulation

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