Dr. Ryoichi Inanami
at Toshiba Corp
SPIE Involvement:
Author
Publications (18)

PROCEEDINGS ARTICLE | March 31, 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Nanotechnology, Lithography, Optical microscopes, Optical lithography, Ultraviolet radiation, Design for manufacturing, Artificial intelligence, Double patterning technology, Nanoimprint lithography, Photoresist processing, Scatter measurement, Nanolithography, UV optics, Design for manufacturability

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Semiconductors, Lithography, Optical lithography, Calibration, Ultraviolet radiation, Computer simulations, Design for manufacturing, Double patterning technology, Computational lithography, Nanoimprint lithography, Photoresist processing, Optics manufacturing, Nanolithography, Design for manufacturability

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Semiconductors, Lithography, Diffractive optical elements, Electrodes, Ultraviolet radiation, Photography, Coating, Silicon films, Nanoimprint lithography, Positron emission tomography

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Semiconductors, Lithography, Optical lithography, Ultraviolet radiation, Manufacturing, Design for manufacturing, Directed self assembly, Source mask optimization, Computational lithography, Photoresist processing

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Optical lithography, Ultraviolet radiation, Nickel, Silicon, Atomic force microscopy, Scanning electron microscopy, Nanoimprint lithography, Semiconducting wafers, Positron emission tomography

SPIE Journal Paper | April 1, 2010
JM3 Vol. 9 Issue 02
KEYWORDS: Diffraction, Tolerancing, Critical dimension metrology, Design for manufacturability, Manufacturing, Error analysis, Extreme ultraviolet lithography, Polarization, Extreme ultraviolet, Lithography

Showing 5 of 18 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top