Mr. Ryoichi Nohdomi Profile

Ryoichi Nohdomi

at Gigaphoton Inc

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 2 March 2020 Paper

High peak power DUV laser processing

Yasuhiro Kamba, Hironori Igarashi, Takashi Onose, Taisuke Miura, Ryoichi Nohdomi, Hiroaki Oizumi, Yoshihiko Murakami, Atsushi Fuchimukai, Chen Qu, Yuki Tamaru, Yohei Tanaka, Yuujirou Sasaki, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 11273, 112730L (2020) https://doi.org/10.1117/12.2549826

KEYWORDS: Excimer lasers, Deep ultraviolet, Laser processing, Pulsed laser operation, Picosecond phenomena, Laser drilling, Semiconductors, Lithography, Fiber lasers, Light sources

Read Abstract +

Proceedings Article | 11 April 2008 Paper

High-power and high-energy stability injection lock laser light source for double exposure or double patterning ArF immersion lithography

Masaya Yoshino, Hiroaki Nakarai, Takeshi Ohta, Hitoshi Nagano, Hiroshi Umeda, Yasufumi Kawasuji, Toru Abe, Ryoichi Nohdomi, Toru Suzuki, Satoshi Tanaka, Yukio Watanabe, Taku Yamazaki, Shinji Nagai, Osamu Wakabayashi, Takashi Matsunaga, Kouji Kakizaki, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 6924, 69242S (2008) https://doi.org/10.1117/12.778430

KEYWORDS: Light sources, Double patterning technology, High power lasers, Laser stabilization, Power supplies, Laser applications, Oscillators, Error analysis, Excimer lasers, Laser development

Read Abstract +

Proceedings Article | 7 March 2008 Paper

Reliable high power injection locked 6 kHz 60W laser for ArF immersion lithography

Takahito Kumazaki, Toru Suzuki, Satoshi Tanaka, Ryoichi Nohdomi, Masaya Yoshino, Shinichi Matsumoto, Yasufumi Kawasuji, Hiroshi Umeda, Hitoshi Nagano, Kouji Kakizaki, Hiroaki Nakarai, Takashi Matsunaga, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 6924, 69242R (2008) https://doi.org/10.1117/12.778149

KEYWORDS: Semiconducting wafers, Reliability, Immersion lithography, Light sources, Laser stabilization, Metrology, High power lasers, Spectroscopy, Laser development, Laser applications

Read Abstract +

Proceedings Article | 27 March 2007 Paper

Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography

Hidenori Watanabe, Shigeo Komae, Satoshi Tanaka, Ryoichi Nohdomi, Taku Yamazaki, Hiroaki Nakarai, Junichi Fujimoto, Takashi Matsunaga, Takashi Saito, Kouji Kakizaki, Hakaru Mizoguchi

Proceedings Volume 6520, 652031 (2007) https://doi.org/10.1117/12.711258

KEYWORDS: Molybdenum, High power lasers, Laser systems engineering, Laser applications, Light sources, Systems modeling, Semiconductors, Lithography, Electrodes, Pulsed laser operation

Read Abstract +

Proceedings Article | 28 May 2004 Paper

Highly durable 4-kHz ArF excimer laser G42A for sub-90-nm lithography

Takashi Saito, Hirotoshi Inoue, Hitoshi Nagano, Masaya Yoshino, Osamu Wakabayashi, Ryoichi Nohdomi, Toshihiro Nishisaka, Akira Sumitani, Hitoshi Tomaru, Hakaru Mizoguchi

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534475

KEYWORDS: Excimer lasers, Lithography, Reliability, Data modeling, Optical lithography, High power lasers

Read Abstract +

Proceedings Article | 10 November 2003 Paper

Development of 5 kHz ultra-line-narrowed F2 laser for dioptric projection system

Hakaru Mizoguchi, Ryoichi Nohdomi, Tatsuya Ariga, Kazuaki Hotta, Kiyoharu Nakao, Koichi Kasuya

Proceedings Volume 5120, (2003) https://doi.org/10.1117/12.515510

KEYWORDS: Oscillators, Amplifiers, Pulsed laser operation, Laser development, Refractor telescopes, Laser systems engineering, Projection systems, Spectroscopy, Resonators, Combined lens-mirror systems

Read Abstract +

Proceedings Article | 26 June 2003 Paper

Spectral dynamics analysis of utlra-line-narrowed F2 laser

Takahito Kumazaki, Osamu Wakabayashi, Ryoichi Nohdomi, Tatsuya Ariga, Hidenori Watanabe, Kazuaki Hotta, Hakaru Mizoguchi, Hiroki Tanaka, Akihiko Takahashi, Tatsuo Okada

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485381

KEYWORDS: Pulsed laser operation, Oscillators, Optical simulations, Laser systems engineering, Laser development, Amplifiers, Numerical simulations, Optical amplifiers, Resonators, Luminescence

Read Abstract +

Proceedings Article | 30 July 2002 Paper

Spectral metrologies for ultra-line-narrowed F2 laser

Takanori Nakaike, Osamu Wakabayashi, Toru Suzuki, Hakaru Mizoguchi, Kiyoharu Nakao, Ryoichi Nohdomi, Tatsuya Ariga, Naoki Kitatochi, Takashi Suganuma, Takahito Kumazaki, Kazuaki Hotta, Masaki Yoshioka

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474560

KEYWORDS: Spectroscopy, Vacuum ultraviolet, Laser development, Calibration, Refractor telescopes, Metrology, Light sources, Laser systems engineering, Oscillators, Optical lithography

Read Abstract +

Proceedings Article | 30 July 2002 Paper

Development of a 5-kHz ultra-line-narrowed F2 laser for dioptric projection systems

Tatsuya Ariga, Hidenori Watanabe, Takahito Kumazaki, Naoki Kitatochi, Kotaro Sasano, Yoshifumi Ueno, Masayuki Konishi, Takashi Suganuma, Masaki Nakano, Toshio Yamashita, Toshihiro Nishisaka, Ryoichi Nohdomi, Kazuaki Hotta, Hakaru Mizoguchi, Kiyoharu Nakao

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474613

KEYWORDS: Oscillators, Pulsed laser operation, Amplifiers, Refractor telescopes, Laser development, Laser systems engineering, Projection systems, Laser stabilization, Spectroscopy, Mirrors

Read Abstract +

Proceedings Article | 25 February 2002 Paper

Ultra-line-narrowed F2 laser for microlithography

Hiroshi Komori, Tatsuya Ariga, Hidenori Watanabe, Takahito Kumazaki, Naoki Kitatochi, Kotaro Sasano, Yoshifumi Ueno, Toshihiro Nishisaka, Ryoichi Nohdomi, Kazuaki Hotta, Hakaru Mizoguchi, Kiyoharu Nakao

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456815

KEYWORDS: Oscillators, Laser development, Pulsed laser operation, Optical amplifiers, Laser systems engineering, Laser applications, Optical lithography, Lithography, Amplifiers, Refractor telescopes

Read Abstract +

Proceedings Article | 14 September 2001 Paper

Challenge of the F2 laser for dioptric projection system

Tatsuya Ariga, Hidenori Watanabe, Takahito Kumazaki, Naoki Kitatochi, Kotaro Sasano, Yoshifumi Ueno, Toshihiro Nishisaka, Ryoichi Nohdomi, Kazuaki Hotta, Hakaru Mizoguchi, Kiyoharu Nakao

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435650

KEYWORDS: Oscillators, Optical amplifiers, Amplifiers, Refractor telescopes, Laser systems engineering, Laser development, Pulsed laser operation, Optical lithography, Projection systems, Combined lens-mirror systems

Read Abstract +

Showing 5 of 11 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years