Ryoichi Nohdomi
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 11 April 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Light sources, Oscillators, High power lasers, Error analysis, Laser applications, Laser development, Power supplies, Laser stabilization, Excimer lasers, Double patterning technology

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Light sources, Metrology, Spectroscopy, High power lasers, Reliability, Laser applications, Laser development, Laser stabilization, Immersion lithography, Semiconducting wafers

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Semiconductors, Lithography, Light sources, Electrodes, High power lasers, Laser applications, Molybdenum, Pulsed laser operation, Systems modeling, Laser systems engineering

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Optical lithography, Data modeling, High power lasers, Reliability, Excimer lasers

Proceedings Article | 10 November 2003
Proc. SPIE. 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
KEYWORDS: Oscillators, Resonators, Spectroscopy, Laser development, Amplifiers, Projection systems, Pulsed laser operation, Refractor telescopes, Combined lens-mirror systems, Laser systems engineering

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Optical amplifiers, Oscillators, Resonators, Luminescence, Laser development, Numerical simulations, Amplifiers, Optical simulations, Pulsed laser operation, Laser systems engineering

Showing 5 of 10 publications
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