Mr. Ryota Matsuki Profile

Ryota Matsuki

at HORIBA STEC Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 25 March 2019 Paper

Influence of PDI and composition ratio for micro phase separation about PS-b-PMMA block copolymer

Terumasa Kosaka, Ryota Matsuki, Yukio Kawaguchi, Ryosuke Ogaki

Proceedings Volume 10960, 109601I (2019) https://doi.org/10.1117/12.2514961

KEYWORDS: Polymerization, Picosecond phenomena, Polymers, Polymethylmethacrylate, Scanning electron microscopy, Directed self assembly, Semiconductors, Lithography, Metals

Read Abstract +

Proceedings Article | 19 March 2018 Presentation

Defect dynamics in directed self-assembly of block copolymers (Conference Presentation)

Tsukasa Azuma, Yuriko Seino, Hironobu Sato, Yusuke Kasahara, Katsuyoshi Kodera, Ken Miyagi, Masayuki Shiraishi, Ryota Matsuki, Terumasa Kosaka, Toshiyuki Himi, Seiji Nagahara, Alvin Chandra, Ryuichi Nakatani, Teruaki Hayakawa, Kenji Yoshimoto, Takuya Omosu, Mikihito Takenaka

Proceedings Volume 10586, 105860S (2018) https://doi.org/10.1117/12.2297310

KEYWORDS: Directed self assembly, Image processing, Signal processing, Electron beam lithography, Lithography, Annealing, Thin films, Epitaxy, Data modeling, 3D modeling

Read Abstract +

Proceedings Article | 27 March 2017 Paper

Development of mass production technology for block copolymer lithographic materials

Toshiyuki Himi, Ryota Matsuki, Terumasa Kosaka, Ryosuke Ogaki, Yukio Kawaguchi, Tetsuo Shimizu

Proceedings Volume 10146, 101461Z (2017) https://doi.org/10.1117/12.2258167

KEYWORDS: Directed self assembly, Polymerization, Lithography, Polymers, High volume manufacturing, Optical lithography, Semiconductors, Molecular self-assembly, Neodymium, Polymethylmethacrylate

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years