Dr. Ryuta Mizuochi
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Silicon, Reactive ion etching, Scanning transmission electron microscopy, Optical lithography, Spectroscopy, Semiconducting wafers, Chromium

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