Dr. Ryutaro Maeda
at AIST
SPIE Involvement:
Author
Publications (51)

Proceedings Article | 17 September 2012 Paper
Proc. SPIE. 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
KEYWORDS: X-ray optics, X-rays, Wafer-level optics, Semiconducting wafers, Silicon, Microelectromechanical systems, Spatial resolution, Mirrors, Coating, Metals

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, Scanning electron microscopy, X-ray technology, Nickel, X-ray imaging, Self-assembled monolayers

Proceedings Article | 30 April 2009 Paper
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: X-rays, Mirrors, Silicon, X-ray optics, Microelectromechanical systems, X-ray technology, Nickel, Semiconducting wafers, Hydrogen, Wafer-level optics

Proceedings Article | 24 July 2008 Paper
Proc. SPIE. 7021, High Energy, Optical, and Infrared Detectors for Astronomy III
KEYWORDS: Gold, Silicon, X-rays, Etching, Deep reactive ion etching, X-ray astronomy, Semiconducting wafers, Sensors, X-ray technology, Photoresist materials

Proceedings Article | 11 January 2008 Paper
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Photovoltaics, Electrodes, Crystals, Microelectromechanical systems, Optical sensors, Semiconductors, Lead, Scanning electron microscopy, Optical properties, Ferroelectric materials

Showing 5 of 51 publications
Conference Committee Involvement (1)
Micromachining and Microfabrication
30 March 1999 | Paris, France
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