Dr. Ryutaro Maeda
at AIST
SPIE Involvement:
Conference Program Committee | Author
Publications (51)

PROCEEDINGS ARTICLE | September 17, 2012
Proc. SPIE. 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Mirrors, X-ray optics, Metals, X-rays, Silicon, Coating, Spatial resolution, Semiconducting wafers

SPIE Journal Paper | July 1, 2009
JM3 Vol. 8 Issue 03
KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, Scanning electron microscopy, X-ray technology, Nickel, X-ray imaging, Self-assembled monolayers

PROCEEDINGS ARTICLE | April 30, 2009
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Mirrors, X-ray optics, X-rays, Nickel, Silicon, Hydrogen, Semiconducting wafers, X-ray technology

PROCEEDINGS ARTICLE | July 24, 2008
Proc. SPIE. 7021, High Energy, Optical, and Infrared Detectors for Astronomy III
KEYWORDS: Gold, Sensors, Etching, X-rays, Silicon, Photoresist materials, Deep reactive ion etching, X-ray astronomy, Semiconducting wafers, X-ray technology

PROCEEDINGS ARTICLE | January 11, 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Semiconductors, Photovoltaics, Ferroelectric materials, Optical sensors, Optical properties, Electrodes, Crystals, Scanning electron microscopy, Lead

PROCEEDINGS ARTICLE | January 9, 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Polymethylmethacrylate, Etching, X-rays, Nickel, Silicon, Scanning electron microscopy, Photomasks, Photoresist processing, X-ray lithography, X-ray technology

Showing 5 of 51 publications
Conference Committee Involvement (1)
Micromachining and Microfabrication
30 March 1999 | Paris, France
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top